etch profile meaning in Chinese
腐蚀断面图
Examples
- Finally , according to the technique of plasma etching , an evolution model describing the spatio - temporal profiles of the micro - trench is established . and that we simulated the effects of collisions and the source parameters on the etching profiles
最后，针对等离子体刻蚀工艺，建立了微结构区剖面的时空演化模型，并模拟了碰撞效应和电源参数对刻蚀剖面演化的影响。 - In the present works , a self - consistent model describing the dynamics of radio - frequency ( rf ) sheath was established . the effects of collisions on the rf sheath dynamics , distributions of ion energy and angle incident on the substrate and the etching profiles were investigated numerically
本文建立了一套自洽的碰撞射频等离子体鞘层理论模型，系统地研究了碰撞效应对等离子体鞘层的物理特性、离子入射到基板上的能量分布和角度分布以及刻蚀剖面的影响。